Facilities

Our activity relies on a complete, in-house chain from device fabrication to low-temperature quantum transport, complemented by the shared platforms of the IPCMS.

Nanofabrication and 2D materials (see also STnano platform )
We access the STnano cleanroom, part of the national Renatech+ network, for the full nanostructuring process flow:

Lithography: electron-beam lithography (Zeiss Supra 40 + Raith Elphy Plus), direct laser writing (Heidelberg µPG101, 375 nm), and optical mask alignment (Süss MJB4 / MJB3).

Thin-film deposition: e-beam evaporation of metals (Plassys MEB550S and MEB400), Joule evaporation (Plassys MEB300, with LN₂-cooled stage), magnetron sputtering (Alliance Concept EVA300+, RF/DC), and glovebox-integrated atomic layer deposition (Al₂O₃ and HfO₂).

Etching: Ar⁺ ion-beam etching with in-situ SIMS end-point detection, reactive ion etching (Plasmalab 80 Plus, ICP), and wet acid etching.

2D materials Lab (2DLab): a dedicated cleanroom for exfoliation of graphene and transition-metal dichalcogenides and for assembly of van der Waals heterostructures, using three transfer stations including 2 fully automated glovebox setup.

Back-end and characterization: gold wire bonding, precision dicing, atomic force microscopy (C-AFM, PFM, MFM), profilometry, and probe stations.

Cryogenic magnetotransport (see also Magnetic Measurements Platform)
We operate a range of complementary cryogenic systems, from high-field platforms to fast table-top setups:

A semi-closed-cycle cryostat, 8 T, base temperature 1.5 K, with a 20 mm insert combining optical fiber access and an attocube AFM stick for local probing.

A 9 T PPMS, base temperature 2 K, equipped with rotator, FMR, and custom sticks for optics and high-frequency/impedance measurements.

A 12 T PPMS, base temperature 2 K, with the same rotator, FMR, and custom optics/high-frequency/impedance capabilities.

Two table-top cryostats (INSTEC) for fast transport and optoelectronic measurements, one of them optimized for GHz-range high-frequency characterization.

Electrical characterization
A complete instrumentation set for DC and AC transport and dielectric response:

Lock-in amplifiers (Stanford Research, Zurich Instruments MFLI) with dedicated preamplifiers, for combined AC and DC measurements.

Multiple source-measure units (Keithley 26xx series).

Impedance analyzer and impedance spectroscopy setups.

Keithley 4200 parametric analyzer with multiple options.

Laser sources and diodes coupled to optical fibers and cryostat inserts for optoelectronic and photo-response measurements.

And others …